Trichlorosilane(TCS)
| Items | Unit | Specifications | |
| Appearance | Colorless,Transparent Liquid without Mechanica Impurity | ||
| Trichlorosilane | % m/m | ≥99.75 | |
| Dichlorosilane | % m/m | ≤0.01 | |
| Silicon Tetrachloride | % m/m | ≤0.05 | |
| High Boiling | % m/m | ≤0.1 | |
Product:Trichlorosilane
Appearance:Colorless,Transparent Liquid without Mechanica Impurity
Molecular Formula: SiHCl3
CAS NO.:10025-78-2
Application: Used to compose the organosilane,alkyl and chlorosilane. It is the basic monomer in silane coupling agent,and the material of the semiconductor silicon and polysilicon.
Package:ISO TANK
