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Trichlorosilane(TCS)

Commodity: Trichlorosilane(TCS)
Appearance: Transparent liquid without suspension and sediments.
Molecular Formula: SiHCl3
Application: Used to compose the organosilane,alkyl and chlorosilane. It is the basic monomer in silane coupling agent,and the material of the semiconductor silicon and polysilicon.
Package & Storage:The bulk product should be transported by tank- truck.During the transportation,should avoid impacting, and also avoid solarization,rain,high temperature and away from fire source ,heat source.
Safety Protection: Operators should wear chemical gloves,gas masks and safety goggles.

Items
Index
 
First Class
Qualified
Appearance
Colorless Transparent volatile Liquid
The content of Trichlorosilane % ≥
99.5
98.0
The content of Dichlorosilane % ≤
0.20
0.50
The content of tetrachlorosilane % ≤
0.25
0.70
The content of Chlorine silane polymer,% ≤
0.05
0.30
The content of boron % ≤
0.00001
0.00005
 
 
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